Publications

Teams from the University of Tennessee and Oak Ridge National Lab demonstrated inert gas enhanced laser assisted purification of platinum electron beam induced deposits using the Waviks vesta in the SEM. Their work was published in ACS Applied Materials & Interfaces. Figure 1. Schematic of the (a) EBID + pulsed laser reactive gas anneal, (b)…

Teams from University of Tennessee, Oak Ridge National Lab, and Intel Corporation demonstrated in situ mitigation of helium beam damage using the Waviks Vesta. Their work was published in Small.  Figure 1. Schematic of laser-assisted sub-surface damage mitigation. Schematic of helium ion exposures (a) without and (b) with pulsed laser-assist to photothermally enhance implanted ion diffusion…

Researchers from University of Tennessee, Intel Corporation, Oak Ridge National Lab and Waviks explored laser assisted focused Helium Ion Beam induced etching both with and without xenon-difluoride gas assist. Their work was published in ACS Applied Materials & Interfaces.  Figure 1. (a) Schematic of the focused ion beam induced etching (FIBIE) setup. The focused 785…

Teams from University of Tennessee, Graz Centre for Electron Microscopy, and Oak Ridge National Lab explored 3D nanoprinting via laser-assisted electron beam induced deposition. Their work was published in the Beilstein Journal of Nanotechnology. Figure 1: Schematic illustrating the experimental system which includes a laser delivery system, precursor and co-reactant gas delivery systems, and the…

Collaborators from University of Notre Dame, University of Tennessee, and Oak Ridge National Lab explored photothermal heating pathways using the Waviks Vesta. Their work was published in Microscopy and Microanalysis. Figure 1 a: Schematic illustrating the end of the optical delivery system which re-images a laser-coupled single mode fiber optical fiber onto the transmission electron microscopy…

Teams from Oak Ridge National Laboratory, University of Tennessee, Utah State University, and Graz University of Technology demonstrated electron beam induced deposition purification via pulsed laser induced oxidation reaction using the Waviks Vesta. Their work was published in ACS Applied Materials & Interfaces.  Figure 1. (A) Schematic of the laser annealing setup with approximately 100 μm…