Teams from the University of Tennessee and Oak Ridge National Lab demonstrated inert gas enhanced laser assisted purification of platinum electron beam induced deposits using the Waviks vesta in the SEM. Their work was published in ACS Applied Materials & Interfaces.

Figure 1. Schematic of the (a) EBID + pulsed laser reactive gas anneal, (b) reactive laser-assisted electron-beam-induced deposition, and (c) sequential or layer-by-layer EBID plus laser reactive gas anneal purification processes.

Recently, we have demonstrated enhanced purification of EBID deposits using an in situ laser anneal technique. In this process, so-called laser-assisted electron-beam-induced deposition (LAEBID), synchronized laser pulses were used to assist intermittently in the thermal desorption of byproducts after each electron-beam pass. This method was successful in improving deposit purity as well as spatial resolution of the direct write EBID process; however, LAEBID could not completely purify the deposits. To promote further purification of EBID patterns deposited from the MeCpPtMe3 organometallic precursor, we recently demonstrated an in-chamber pulsed laser-induced oxidation purification process. The process was able to fully purify deposits in a minimally invasive manner via a photothermal oxidation reaction.

Reference:

Michael G. Stanford, Brett B. Lewis, Joo Hyon Noh, Jason D. Fowlkes, and Philip D. Rack
ACS Applied Materials & Interfaces 2015 7 (35), 19579-19588

DOI: 10.1021/acsami.5b02488

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