Electron-beam-induced current measurements
Acquire current response generated by electron-beam interaction with contacted samples and devices.
Electrical characterization
EBIC
Measure electron-beam-induced current from contacted samples and compare electrical response with SEM/FIB image features.
Measurement overview
Electrical response measurements for contacted SEM/FIB samples.
Waviks EBIC measures electron-beam-induced current from contacted samples and compares local electrical response with SEM/FIB image features. The signal path is planned around sample contacts, feedthroughs, electronics, and acquisition needs.
Electrical measurement
Sample interfacing
SEM/FIB imaging
Signal acquisition
Software acquisition
Capabilities
Electrical characterization with electron microscopy context.
Final integration depends on microscope geometry, chamber access, electrical feedthroughs, detector configuration, sample preparation, and experiment requirements.
Electrical characterization
Support electrical measurement paths that connect sample contacts, acquisition hardware, and microscope operation.
Semiconductor device analysis
Investigate junctions, active regions, defects, and device behavior in SEM/FIB measurements.
Correlated electron/electrical experiments
Relate electrical response to electron microscopy images, sample features, and experiment conditions.
Signal acquisition and mapping
Support point measurements, mapped response, and spatial comparison against imaging data.
Waviks EBIC Software
Use the standalone software suite to control gain, bandwidth, coupling, and EBIC/BSE mode selection.
Module Specifications
Waviks EBIC Hardware and Software
Waviks EBIC Software is a standalone suite, separate from Aether. Sample contacts, feedthroughs, and the microscope imaging input are matched to the installation.
| Amplifier | Current-sensitive transimpedance amplifier (TIA) |
|---|---|
| Low Noise Gain | 103-109 V/A, selectable in Waviks EBIC Software |
| High Speed Gain | 105-1011 V/A, selectable in Waviks EBIC Software |
| TIA Bandwidth | Up to 500 kHz (-3 dB), depending on gain and operating mode |
| Power | Internal rechargeable battery; battery status shown on the controller and in software |
| Coupling | AC or DC coupled amplification |
| Amplifier Output | +/-10 V output to a compatible SEM BSE imaging input |
| Software | Standalone Waviks EBIC Software on a supplied touchscreen tablet or microscope PC |
| Controls | Gain, bandwidth, AC/DC coupling, battery state, and EBIC/BSE imaging mode |
| Signal Connection | Shielded electrical feedthrough and triaxially shielded connections |
| Sample Holder | Dedicated holder supplied with each module; custom holders available |
Applications
Electrical measurements for devices and electronic materials.
EBIC helps researchers connect electrical behavior with structure, defects, interfaces, and local microscope observations.
S
Semiconductor devices
Connect local current response with device structures, contacts, junctions, and microscopy observations.
J
Junction characterization
Study spatial electrical behavior around junctions, interfaces, and active regions.
D
Defect analysis
Investigate how defects or local material variation influence electrical response.
F
Failure analysis
Use correlated imaging and electrical response to support device troubleshooting workflows.
E
Electronic materials research
Explore materials where local electrical behavior benefits from SEM/FIB context.
C
Correlative microscopy
Compare electrical maps, imaging, and optional optical data inside a unified experiment path.
EBIC signal path
From contacted sample to software-controlled acquisition.
EBIC measurements connect a contacted sample, signal path, controller, SEM imaging context, and software acquisition.
Plan the measurement path.
Discuss contacts, feedthroughs, amplifier settings, imaging input, coupling, gain, bandwidth, and software acquisition before quoting a configuration.
Designed for contacted samples.
Works with contacted samples, dedicated or custom sample holders, and existing probe-station outputs where configured.
Planning an EBIC experiment?
Tell us your microscope, detector configuration, sample type, and electrical measurement goals. Waviks can help determine the right EBIC configuration.