SEM/FIB optical accessory

Vesta for SEM/FIB

Bring Raman spectroscopy, local laser heating, and photon collection to the region you examine in the SEM/FIB.

Vesta installed on an SEM/FIB system
Vesta SEM/FIB installation context for chamber optical access and coincident-point measurements.

Accessory overview

Optical access for SEM and FIB measurements at the chamber.

Vesta for SEM/FIB adds chamber-based optical access so selected SEM/FIB systems can deliver light, collect optical signals, and align measurements near the electron-beam point of analysis.

Vesta optical paths support Raman, laser heating, CL/PL, and optical excitation where installed. A separate Waviks EBIC system can add contacted-sample current measurements using its own software.

SEM FIB/SEM Raman Heating Aether

Capabilities

Optical and analytical measurements built around the microscope.

Raman, laser heating, and CL/PL are modular optical paths that can be combined in one instrument when geometry supports them. EBIC is a separate electrical characterization technique. Optical alignment/imaging and Aether are standard across Vesta systems.

In situ Raman spectroscopy

Collect vibrational spectra from regions of interest while preserving the SEM/FIB context needed for site-specific analysis.

Laser heating

Add non-contact photothermal heating for thermal response, process studies, and experiment-specific sample stimulation.

Cathodoluminescence / photoluminescence

Support photon-emission measurements that connect local optical behavior with electron microscopy structure.

Optical alignment and imaging

Use camera-first views and optical path controls to align the sample, laser, collection path, and microscope coordinate frame.

Separate EBIC system

Add contacted-sample current measurements with Waviks EBIC hardware and its standalone software, alongside SEM/FIB imaging.

Aether Software

Control standard Vesta alignment/imaging functions plus installed laser, illumination, motion, spectroscopy, and hardware profiles from Aether Software.

Applications

SEM/FIB applications for materials, devices, and correlative microscopy.

Vesta is most valuable when the optical signal changes what researchers can understand inside the microscope chamber.

Nuclear materials

Study structural change, heating response, and local material behavior with correlative signals.

Semiconductors

Connect Raman, optical, electrical, and electron microscopy data for devices, defects, and process studies.

Beam-sensitive materials

Use photon-based measurements to add context where electron dose, heating, or local response must be managed carefully.

Catalysts

Investigate local structure and response in materials where surface, heat, and stimulation conditions matter.

Energy materials

Explore phase behavior, thermal response, and chemistry in battery, fuel, and advanced energy systems.

Correlative Raman/electron microscopy

Pair site-specific electron imaging with vibrational spectroscopy for richer materials interpretation.

Research-backed application examples

Published Laser-Assisted Experiments

Selected studies illustrate material-specific results, not guaranteed outcomes for every sample or configuration.

Publication example

Laser-assisted EBID purification

Published experiments purified platinum-carbon deposits by laser-induced oxidation, using less than one second of cumulative laser exposure under the studied conditions.

DOI: 10.1021/am506246z

Publication example

Laser-assisted ion-damage mitigation

Synchronized pulsed laser heating reduced implantation and defect concentration by more than 90% in reported helium/neon-ion experiments on silicon.

DOI: 10.1002/smll.201503680

Publication example

Laser-induced graphene and nanofabrication

A 405 nm laser produced graphene features about 12 µm wide from polyimide inside an SEM, a reported reduction of more than 60% relative to earlier published feature sizes.

DOI: 10.1021/acsami.0c01377

Deposition purification in the SEM/FIB with pulsed laser assist.

Planning an SEM/FIB optical experiment?

Tell us your microscope model, chamber geometry, available ports, and measurement goals. Waviks can review the right Vesta SEM/FIB path.

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